Trolier-McKinstry, Susan
Zhu, Wanlin
Akkopru-Akgun, Betul
He, Fan
Ko, Song Won
Fragkiadakis, Charalampos
Mardilovich, Peter
Article Title: Reliability of piezoelectric films for MEMS
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2023 The Author(s). Published on behalf of The Japan Society of Applied Physics by IOP Publishing Ltd
Publication dates
Date Received: 2023-07-31
Date Accepted: 2023-08-31
Online publication date: 2023-09-21