Ishiji, Kotaro https://orcid.org/0000-0003-4736-7347
Yoneyama, Akio https://orcid.org/0000-0001-6925-6723
Inaba, Masayuki
Fukuda, Kazunori
Sakaki, Atsushi
Ohmagari, Shinya https://orcid.org/0000-0001-5636-2316
Sugie, Ryuichi https://orcid.org/0000-0002-1297-3438
Article Title: 3D structure of threading screw dislocation at a deep location in 4H-SiC using 3D micro-X-ray topography
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2024 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2023-09-27
Date Accepted: 2023-10-22
Online publication date: 2024-01-04