Chau, Kam-Hong https://orcid.org/0000-0002-3192-3938
Kawai, Yoshinobu
Kan, Chi-Wai
Syu, Jia-Lin
Liu, Yen-Chun
Chen, Ying-Hung
Liang, Chen-Jui
He, Ju-Liang
Article Title: Analysis of a second peak of electron density observed in high-power impulse magnetron sputtering plasma using a Langmuir probe
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2024 The Author(s). Published on behalf of The Japan Society of Applied Physics by IOP Publishing Ltd
Publication dates
Date Received: 2023-07-15
Date Accepted: 2023-12-07
Online publication date: 2024-01-15