Nakajima, Yusuke
Takashima, Akira
Noguchi, Masaki
Isogai, Tatsunori
Article Title: Fabrication of a wider bandgap θ-Al2O3 by oxidation of ultrathin AlN films for leakage current reduction
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2024 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2023-10-12
Date Accepted: 2024-01-09
Online publication date: 2024-02-16