Pollefliet, Bert https://orcid.org/0000-0003-3663-8842
Porret, Clement
Everaert, Jean-Luc
Sankaran, Kiroubanand
Piao, Xiaoyu
Rosseel, Erik
Conard, Thierry
Impagnatiello, Andrea
Shimura, Yosuke
Horiguchi, Naoto
Loo, Roger
Vantomme, André
Merckling, Clement
Article Title: Crystallinity and composition of Sc1−x(−y)Si x (P y ) silicides in annealed TiN/Sc/Si:P stacks for advanced contact applications
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2024 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2023-10-13
Date Accepted: 2024-01-15
Online publication date: 2024-02-06