Liu, Ping-Che
Lin, Po-Jung
Chen, Yu-Chi
Chen, Chien-Wei
Kei, Chi-Chung
Li, Pei-Wen
Lin, Horng-Chih
Article Title: A low-temperature photoresist-based film-profile engineering scheme for fabricating bottom- and double-gated indium–gallium–zinc oxide TFTs
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2024 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2023-10-12
Date Accepted: 2024-01-21
Online publication date: 2024-02-14