Nakagawa, Masaru https://orcid.org/0000-0001-7735-0453
Onuma, Akiko
Niinomi, Hiromasa https://orcid.org/0000-0001-7003-5434
Asano, Toshiya
Itoh, Shintaro https://orcid.org/0000-0002-0439-1964
Fukuzawa, Kenji https://orcid.org/0000-0003-2504-693X
Article Title: Effect of thickness of surface silicon oxide on liquid advancement in nanogaps between synthetic quartz mold and silicon substrate surfaces in UV nanoimprinting
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2024 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2023-11-20
Date Accepted: 2024-02-13
Online publication date: 2024-03-18