Lee, Junyeop
Hwang, Seongpil
Han, Uksu
Jung, Dong Geon
Kim, Chang-Hyun
Lee, Suwoong
Jung, Daewoong
Article Title: Design and fabrication of poly-Si/SiO2 Fabry–Perot filter for nondispersive IR CO2 sensors
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2024 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2023-12-13
Date Accepted: 2024-02-13
Online publication date: 2024-03-07