Chu, Qiao https://orcid.org/0009-0004-0194-2558
Masunaga, Masahiro https://orcid.org/0000-0003-1464-8193
Shima, Akio
Kita, Koji https://orcid.org/0000-0002-3753-8125
Article Title: Comparative study of mechanical stress-induced flat-band voltage change in MOS capacitor and threshold voltage change in MOSFET fabricated on 4H-SiC (0001)
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2024 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2023-12-21
Date Accepted: 2024-02-18
Online publication date: 2024-03-01