Kageshima, Hiroyuki https://orcid.org/0000-0003-3136-2525
Akiyama, Toru https://orcid.org/0000-0002-2800-2011
Shiraishi, Kenji https://orcid.org/0000-0001-5641-6986
Article Title: First-principles study on barrier height of silicon emission from interface into oxide during silicon thermal oxidation
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2024 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2023-11-28
Date Accepted: 2024-02-20
Online publication date: 2024-03-19