Takitani, Sho
Baba, Akiyoshi
Nishizawa, Hideaki
Suzuki, Keisuke
Article Title: An efficient polishing process for silicon carbide using ion implantation method
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2024 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2023-12-07
Date Accepted: 2024-03-06
Online publication date: 2024-04-02