Suzuki, Haruto
Miyazawa, Ryo
Miura, Masanori
Ahmmad, Bashir
Hirose, Fumihiko https://orcid.org/0000-0001-9354-2850
Article Title: Room temperature atomic layer deposition of zinc titanium oxide using sequential adsorption of dimethyl zinc and tetrakis(dimethylamino)titanium
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2024 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2023-11-27
Date Accepted: 2024-03-13
Online publication date: 2024-04-12