Luo, Hua-yong
Wu, Ting https://orcid.org/0000-0003-0070-756X
Yang, Zi-jiang
Ye, Chang-yu
Bao, Jing-fu
Hashimoto, Ken-ya https://orcid.org/0000-0001-7377-6457
Article Title: Use of periodic 2D pillar array for performance enhancement of AlN-based SMR BAW resonators
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2024 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2023-11-23
Date Accepted: 2024-03-18
Online publication date: 2024-04-15