Kobayashi, Takumi
Omata, Haruto
Nakagawa, Kiyokazu
Mitani, Yuichiro https://orcid.org/0000-0001-6448-7100
Article Title: Impact of hydrogen plasma treatment on fluorine-contained silicon nitride films
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2024 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2023-12-20
Date Accepted: 2024-03-18
Online publication date: 2024-04-11