Yamamoto, Hiroki
Ito, Yuko Tsutsui https://orcid.org/0000-0001-5867-8832
Okamoto, Kazumasa
Shimoda, Shuhei
Kozawa, Takahiro https://orcid.org/0000-0002-0124-5240
Article Title: A study on the resist performance of inorganic-organic resist materials for EUV and electron-beam lithography
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2024 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2023-12-17
Date Accepted: 2024-03-27
Online publication date: 2024-04-30