Youn, Jeong Hwan
Hong, Sang Jeen http://orcid.org/0000-0002-6576-690X
Article Title: Enhanced temperature uniformity of electrostatic chuck: ceramic surface contact ratio and backside gas pressure
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2024 The Japan Society of Applied Physics
Publication dates
Date Received: 2024-01-12
Date Accepted: 2024-03-31
Online publication date: 2024-04-22