Matsuda, Shogo
Matsuo, Shigeki
Funding for this research was provided by:
Japan Society for the Promotion of Science (JP22K03845)
Article Title: Scanning strategy-dependent etching rate in the formation of through-via holes by femtosecond laser-assisted etching
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2024 The Author(s). Published on behalf of The Japan Society of Applied Physics by IOP Publishing Ltd
Publication dates
Date Received: 2024-03-26
Date Accepted: 2024-04-11
Online publication date: 2024-05-02