Prozheev, Igor https://orcid.org/0000-0003-2918-415X
Heikkinen, Tanja
Makkonen, Ilja https://orcid.org/0000-0003-4134-8428
Mizohata, Kenichiro https://orcid.org/0000-0003-1703-2247
Tuomisto, Filip https://orcid.org/0000-0002-6913-5654
Funding for this research was provided by:
Air Force Office of Scientific Research (FA8655-23-1-7057)
Suomen Kulttuurirahasto (00220833)
Article Title: In-grown and irradiation-induced Al and N vacancies in 100 keV H+ implanted AlN single crystals
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2024 The Author(s). Published on behalf of The Japan Society of Applied Physics by IOP Publishing Ltd
Publication dates
Date Received: 2024-05-15
Date Accepted: 2024-05-30
Online publication date: 2024-07-01