Takeuchi, Masaya https://orcid.org/0009-0000-3380-7925
Suzuki, Satoru https://orcid.org/0000-0002-7631-5346
Nakamura, Masaki
Hata, Takashi
Nishiuchi, Yusuke
Tada, Kaori
Toyoda, Noriaki https://orcid.org/0000-0003-4066-8702
Article Title: Highly sensitive electron-beam-induced X-ray detection from liquid using SiNx membrane ultra-thinned by gas cluster ion beams
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2024 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2023-12-12
Date Accepted: 2024-06-06
Online publication date: 2024-07-22