Takeiri, Junpei
Suzuki, Keisuke
Iura, Hiroaki
Hantani, Taisuke
Morii, Masaki
Nisizawa, Hideaki
Funding for this research was provided by:
Japan Society for the Promotion of Science (21H01229)
Article Title: Study on carbon allotrope abrasive particles based on C60 molecule for diamond chemical mechanical polishing
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2024 The Author(s). Published on behalf of The Japan Society of Applied Physics by IOP Publishing Ltd
Publication dates
Date Received: 2024-02-07
Date Accepted: 2024-06-19
Online publication date: 2024-08-13