Tsuda, Yoshika https://orcid.org/0009-0009-8396-991X
Muroya, Yusa
Kozawa, Takahiro https://orcid.org/0000-0002-0124-5240
Ikeda, Takuya
Komuro, Yoshitaka
Article Title: Effects of acid generator anions on radiation-induced decomposition and dissolution kinetics of chemically amplified resists
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2024 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2024-06-27
Date Accepted: 2024-08-05
Online publication date: 2024-08-27