Nakahama, Yugo https://orcid.org/0009-0000-5854-2492
Takahashi, Kazunori https://orcid.org/0000-0001-5690-1893
Article Title: Effect of gas injection pattern on magnetically expanding rf plasma source
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2024 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2024-05-22
Date Accepted: 2024-08-12
Online publication date: 2024-09-19