Jinbo, Yoshinori https://orcid.org/0009-0009-9819-9794
Sanada, Toshiyuki https://orcid.org/0000-0003-4636-8364
Article Title: Three-dimensional numerical simulation of the single-wafer spin rinsing process using OpenFOAM
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2025 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2024-11-14
Date Accepted: 2025-01-07
Online publication date: 2025-01-27