Yamamoto, Soma
Fujioka, Kohei
Nakato, Ayumi
Otabe, Edmund Soji
Suzuki, Keisuke
Article Title: Study on Cu CMP method using the superconductive assisted machining
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2025 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2024-11-14
Date Accepted: 2025-01-23
Online publication date: 2025-03-19