Fukunaga, Kei
Suzuki, Masashi https://orcid.org/0000-0002-7044-9474
Kakio, Shoji https://orcid.org/0000-0002-5776-1383
Article Title: High-overtone mode bulk acoustic wave resonators based on polarization inverted multilayer SiAlN/ScAlN films
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2025 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2024-12-11
Date Accepted: 2025-01-23
Online publication date: 2025-02-10