Kang, Hojun https://orcid.org/0009-0000-1694-9059
Ito, Tomoko
Ishihara, Takuya
Soeda, Masaru
Sekine, Masashi
Karahashi, Kazuhiro
Hamaguchi, Satoshi https://orcid.org/0000-0001-6580-8797
Funding for this research was provided by:
Azbil Corporation
Japan Society for the Promotion of Science ((A) 21H04453)
Japan Science and Technology Agency (JPMJAP2321)
Article Title: Etching characteristics of aluminum oxide and Inconel 600 Ni-based alloy by energetic fluorine and chlorine ion beams
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2025 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2024-12-15
Date Accepted: 2025-03-09
Online publication date: 2025-04-02