Chen, Fong-Zhi
Chen, Wei-Chun https://orcid.org/0000-0002-0731-418X
Katsunori, Itagaki
Yu, Tung-Yuan
Wang, Wei-Lin
Lin, Yu-Wei
Lee, Chao-Te
Akira, Kodama
Shih, Jin-Yu
Chen, Stanley
Funding for this research was provided by:
National Science and Technology Council (113-2119-M-492-001 -MBK)
Article Title: Direct growth of single-domain epitaxial AlN films on Si(111) by RF/DC magnetron sputtering
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2025 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2025-02-12
Date Accepted: 2025-03-17
Online publication date: 2025-04-03