Deng, Sen
Shao, Hua
Chen, Rui
Han, Dandan
Wei, Yayi
Funding for this research was provided by:
University of Chinese Academy of Sciences (118900M032)
the Youth Innovation Promotion Association of Chinese Academy of Sciences (2023129)
National Key R&D Program of China (No.2023YFB4402600)
China Fundamental Research Funds for the Central Universities (E2ET3801)
Article Title: Modeling conformality of Al2O3 deposited in high aspect ratio structure by atomic layer deposition
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2025 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2024-08-23
Date Accepted: 2025-04-01
Online publication date: 2025-04-22