Article Title: A non-invasive RF sensor for plasma sheath monitoring: exercise in 300 mm transformer coupled plasma—reactive ion etching system
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2025 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2025-01-23
Date Accepted: 2025-04-03
Online publication date: 2025-04-23