Suga, Tadatomo
Article Title: Recent progress in surface activated bonding for 3D and heterogeneous integration
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2025 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2025-01-23
Date Accepted: 2025-04-22
Online publication date: 2025-05-12