Taniguchi, Jun
Article Title: Lifetime prediction of nanoimprint molds
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2025 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2025-03-11
Date Accepted: 2025-05-11
Online publication date: 2025-06-03