Suzuki, Haruto
Suzaki, Satoshi
Takeda, Hibiki
Miyazawa, Ryo
Ahmmad, Bashir
Hirose, Fumihiko https://orcid.org/0000-0001-9354-2850
Article Title: Room-temperature atomic layer deposition of zinc aluminum oxide using sequential adsorption of dimethyl zinc and trimethylaluminum
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2025 The Author(s). Published on behalf of The Japan Society of Applied Physics by IOP Publishing Ltd
Publication dates
Date Received: 2025-02-11
Date Accepted: 2025-05-29
Online publication date: 2025-06-16