Tuzuku, Kohei
Imura, Masataka https://orcid.org/0000-0002-4236-9549
Okumura, Hironori https://orcid.org/0000-0002-5464-9169
Funding for this research was provided by:
Japan Society for the Promotion of Science
Article Title: Reducing vertex radius of curvature for 100 nm size square and triangular holes in GaN by shape modification
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2025 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2025-03-17
Date Accepted: 2025-05-28
Online publication date: 2025-06-16