Oishi, Yuto
Kuwada, Atsuya
Shinohara, Masanori https://orcid.org/0000-0001-9175-5027
Suzuki, Kyoichi https://orcid.org/0000-0003-1811-7103
Maeda, Fumihiko
Matsumoto, Takashi
Article Title: Direct growth of graphene on Si substrate by a PVD and PECVD hybrid method with current-limited pulse discharge
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2025 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2024-10-09
Date Accepted: 2025-06-05
Online publication date: 2025-06-26