Oshima, Takayoshi https://orcid.org/0000-0001-8550-9735
Funding for this research was provided by:
Japan Society for the Promotion of Science (JP24K01368)
Article Title: Step-and-terrace surface formation on (001) β-Ga2O3 by wet etching using 2.38 wt% tetramethylammonium hydroxide (TMAH) lithographic developer
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2025 The Author(s). Published on behalf of The Japan Society of Applied Physics by IOP Publishing Ltd
Publication dates
Date Received: 2025-07-02
Date Accepted: 2025-07-22
Online publication date: 2025-08-06