Taguchi, Seiya
Hashimoto, Syunya
Hong, Chaohuang
Nagao, Masanori
Kawae, Takeshi
Article Title: High-speed micropatterning of oxide thin films by water lift-off with high-pressure water jet
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2025 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2025-07-13
Date Accepted: 2025-09-23
Online publication date: 2025-10-29