Banba, Hironori
Omura, Ichiro
Article Title: U-net segmentation of structured defect patterns in unpatterned wafer inspection maps using synthetic rule-based data
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2026 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2025-11-04
Date Accepted: 2026-01-04
Online publication date: 2026-01-27