Nakano, Takeo https://orcid.org/0000-0002-4474-6619
Maeda, Soga
Mian, Md. Suruz https://orcid.org/0000-0003-2333-8728
Article Title: Particle transport in sputter deposition process using argon or krypton gas: effect of thermalization on deposition rate and thickness uniformity
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2026 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2026-01-19
Date Accepted: 2026-02-06
Online publication date: 2026-02-23