Ishi, Daiki
Ezoe, Yuichiro
Ishikawa, Kumi
Numazawa, Masaki https://orcid.org/0000-0002-4203-2647
Fukushima, Aoto
Otsubo, Ryota
Suzuki, Hikaru
Yuasa, Tatsuya
Sakuda, Sae
Uchino, Tomoki
Fujitani, Maiko
Mitsuda, Kazuhisa
Sowa, Mark J. https://orcid.org/0000-0002-7553-116X
Funding for this research was provided by:
Toray Science Foundation
MEXT/JSPS KAKENHI (17J05475)
MEXT/JSPS KAKENHI (18K18775)
MEXT/JSPS KAKENHI (19J20910)
Journal title: Applied Physics Express
Article type: lett
Article title: Enhanced X-ray reflectivity from Pt-coated silicon micropore optics prepared by plasma atomic layer deposition
Copyright information: © 2020 The Japan Society of Applied Physics
Publication dates
Date received: 2020-04-15
Date accepted: 2020-07-20
Online publication date: 2020-08-04