Qiu, Wei https://orcid.org/0000-0001-8195-1171
Terai, Hirotaka
Funding for this research was provided by:
Core Research for Evolutional Science and Technology (JPMJCR1775)
Exploratory Research for Advanced Technology (JPMJER1601)
Journal title: Applied Physics Express
Article type: lett
Article title: Fabrication of deep-sub-micrometer NbN/AlN/NbN epitaxial junctions on a Si-substrate
Copyright information: © 2020 The Japan Society of Applied Physics
Publication dates
Date received: 2020-09-10
Date accepted: 2020-10-08
Online publication date: 2020-11-05