Park, Seran
Choi, Jeong-Min
Shin, Hyunsu
Ko, Eunjung
Ko, Dae-Hong
Funding for this research was provided by:
Samsung
National Research Foundation of Korea (2017R1A2B2004986)
Journal title: Applied Physics Express
Article type: lett
Article title: Improvement of contact resistivity of titanium silicide on P-doped epitaxial Si using a Se interlayer
Copyright information: © 2020 The Japan Society of Applied Physics
Publication dates
Date received: 2020-08-17
Date accepted: 2020-10-08
Online publication date: 2020-10-27