Huang, Shengzhou https://orcid.org/0000-0002-3184-325X
Wang, Lei
Zheng, Yanchang
Wang, Fengtao
Su, Yongsheng
Funding for this research was provided by:
Natural Science Foundation of Anhui Province (2008085QE258)
Scientific Research Foundation for the Introduction of Talent of Anhui Polytechnic University (2018YQQ027)
Additive Manufacturing Institute, Anhui Polytechnic University (2020ybxm08)
The youth top-notch talent of Anhui Polytechnic University.
Domestic visiting and training program for outstanding young backbone talents from universities and colleges (gxgnfx2019013)
the Key Project of Natural Science Research of Anhui Province (KJ2019A0156)
Chinese National Natural Science Foundation (11705001)
Young and middle-aged top talent project of Anhui Polytechnic University
Article Title: Stitching error compensation for large-area microstructures based on digital oblique scanning exposure mode
Journal Title: Applied Physics Express
Article Type: paper
Copyright Information: © 2020 The Japan Society of Applied Physics
Publication dates
Date Received: 2020-10-09
Date Accepted: 2020-10-26
Online publication date: 2020-11-03