Sugie, Ryuichi https://orcid.org/0000-0002-1297-3438
Uchida, Tomoyuki
Hashimoto, Ai
Akahori, Seishi
Matsumura, Koji
Tanii, Yoshiharu
Article Title: Low-energy cross-sectional cathodoluminescence analysis of the depth distribution of point defects in Si-ion-implanted β-Ga2O3
Journal Title: Applied Physics Express
Article Type: paper
Copyright Information: © 2020 The Japan Society of Applied Physics
Publication dates
Date Received: 2020-10-26
Date Accepted: 2020-11-12
Online publication date: 2020-11-23