Kataoka, Junji
Tsai, Sung-Lin
Hoshii, Takuya https://orcid.org/0000-0002-2873-8715
Wakabayashi, Hitoshi
Tsutsui, Kazuo
Kakushima, Kuniyuki
Article Title: N-type conduction of sputter-deposited polycrystalline Al0.78Sc0.22N films by Si ion implantation
Journal Title: Applied Physics Express
Article Type: paper
Copyright Information: © 2021 The Japan Society of Applied Physics
Publication dates
Date Received: 2020-11-25
Date Accepted: 2020-12-23
Online publication date: 2021-01-12