Miyagawa, Shinsuke
Gotoh, Kazuhiro https://orcid.org/0000-0002-4877-9370
Kutsukake, Kentaro https://orcid.org/0000-0001-7878-347X
Kurokawa, Yasuyoshi https://orcid.org/0000-0002-5319-3622
Usami, Noritaka https://orcid.org/0000-0002-0602-2847
Funding for this research was provided by:
Japan Society for the Promotion of Science (JP18H05514)
Article Title: Application of Bayesian optimization for improved passivation performance in TiO x /SiO y /c-Si heterostructure by hydrogen plasma treatment
Journal Title: Applied Physics Express
Article Type: paper
Copyright Information: © 2021 The Japan Society of Applied Physics
Publication dates
Date Received: 2020-12-06
Date Accepted: 2021-01-04
Online publication date: 2021-01-22