Sun, Huanying
Shen, Xiulin
Sang, Liwen
Imura, Masataka
Koide, Yasuo
You, Jianqiang
Li, Tie-Fu
Koizumi, Satoshi
Liao, Meiyong
Funding for this research was provided by:
JST-PRESTO (JPMJPR19I7)
China Scholarship Council (201904890013)
National Key Research Development Program of China (2016YFA0301200)
National Natural Science Foundation of China (62074091)
BAQIS Research Program (Y18G27)
JSPS KAKENHI (26220903)
Article Title: Thermal mismatch induced stress characterization by dynamic resonance based on diamond MEMS
Journal Title: Applied Physics Express
Article Type: paper
Copyright Information: © 2021 The Japan Society of Applied Physics
Publication dates
Date Received: 2021-01-29
Date Accepted: 2021-02-17
Online publication date: 2021-03-03