Nishimura, Tomoaki
Ikeda, Kiyoji
Kachi, Tetsu
Funding for this research was provided by:
Ministry of Education, Culture, Sports, Science and Technology (JPJ005357)
Article Title: Channeled implantation of magnesium ions in gallium nitride for deep and low-damage doping
Journal Title: Applied Physics Express
Article Type: paper
Copyright Information: © 2021 The Japan Society of Applied Physics
Publication dates
Date Received: 2021-05-06
Date Accepted: 2021-05-20
Online publication date: 2021-06-03