Liu, Zhibin
Guo, Yanan
Yan, Jianchang
Zeng, Yiping
Wang, Junxi
Li, Jinmin
Funding for this research was provided by:
Beijing Nova Program (Z181100006218007)
Youth Innovation Promotion Association CAS (2017157)
the National Key R&D Program of China (2016YFB0400800)
the National Natural Sciences Foundation of China (51872280)
Article Title: Polarity tuning of crystalline AlN films utilizing trace oxygen involved sputtering and post-high-temperature annealing
Journal Title: Applied Physics Express
Article Type: paper
Copyright Information: © 2021 The Japan Society of Applied Physics
Publication dates
Date Received: 2021-05-30
Date Accepted: 2021-07-05
Online publication date: 2021-07-14