Sakurai, Hideki https://orcid.org/0000-0002-3105-4824
Narita, Tetsuo https://orcid.org/0000-0002-0849-360X
Kataoka, Keita https://orcid.org/0000-0003-4855-4339
Hirukawa, Kazufumi https://orcid.org/0000-0001-9167-6150
Sumida, Kensuke https://orcid.org/0000-0002-4894-1809
Yamada, Shinji https://orcid.org/0000-0002-1779-3655
Sierakowski, Kacper https://orcid.org/0000-0002-9447-1182
Horita, Masahiro https://orcid.org/0000-0003-0008-6732
Ikarashi, Nobuyuki https://orcid.org/0000-0002-5575-5780
Bockowski, Michal https://orcid.org/0000-0003-1616-685X
Suda, Jun https://orcid.org/0000-0002-5453-4943
Kachi, Tetsu https://orcid.org/0000-0002-4300-5720
Funding for this research was provided by:
the Polish National Science Centre (2018/29/B/ST5/00338)
MEXT GaN R&D project Program (JPJ005357)
Article Title: Effects of the sequential implantation of Mg and N ions into GaN for p-type doping
Journal Title: Applied Physics Express
Article Type: paper
Copyright Information: © 2021 The Japan Society of Applied Physics
Publication dates
Date Received: 2021-08-24
Date Accepted: 2021-09-28
Online publication date: 2021-10-12