Kim, Young Woong
Lee, Dong Gi
Moon, Seungchan
Ku, Chang Mo
Cho, Joong Hwee
Ahn, Jinho
Article Title: Actinic patterned mask imaging using extreme ultraviolet ptychography microscope with high harmonic generation source
Journal Title: Applied Physics Express
Article Type: paper
Copyright Information: © 2022 The Japan Society of Applied Physics
Publication dates
Date Received: 2022-04-21
Date Accepted: 2022-06-06
Online publication date: 2022-06-17